So I had the same problem....at 1 AM..to setup tablets for the morning! Not cool. I went back to basics and added a layer at a time and tested the mxd against the CreatMobileCache tool. 2 possibilities: it did not like some data that was in geographics (unlikely though). There was 1 point file that was causing the error. Check Geometries did not find any issues, so I used Copy Features and created a new feature class. And that worked! Well done ESRI for providing useless documentation once again.
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